Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1993.02a
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- Pages.4-5
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- 1993
Progress of the Turbo Molecular Pump
- Ota, Masato (Seiko Seiki Co., Ltd.) ;
- Urano, Chiaki (Seiko Seiki Co., Ltd.)
- Published : 1993.02.01
Abstract
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