제어로봇시스템학회:학술대회논문집
- 1993.10a
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- Pages.981-986
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- 1993
Algorithm and control of aligners
Aligner 알고리즘 및 제어
Abstract
A fast algorithm based upon geometry to measure the wafer center and the position of a wafer fiducial mark is developed and implemented on a single-axis aligner. Design issues for a controller when a National Semiconductor's LM629 is used as a PID controller of an aligner are discussed. Performance of an aligner with the algorithm and a LM629 was measured in experiments. The result shows that it takes about 4.1 seconds on average to align a hot wafer supported by metal pins on the chuck.
Keywords