제어로봇시스템학회:학술대회논문집
- 1993.10b
- /
- Pages.545-549
- /
- 1993
An automatic mask alignment system using moire sensors
- Furuhashi, Hideo (Department of Information Network Engineering, Aichi Institute of Electronics, Aichi Institute of Technology) ;
- Uchida, Yoshiyuki (Department of Information Network Engineering, Aichi Institute of Electronics, Aichi Institute of Technology) ;
- Ohashi, Asao (Department of Electrical Engineering Aichi Institute of Technology) ;
- Watanabe, Shigeo (Department of Electrical Engineering Aichi Institute of Technology) ;
- Yamada, Jun (Department of Electronics Aichi Institute of Technology)
- Published : 1993.10.01
Abstract
an alignment system in the X-and Y-directions an X-Y-.theta. stage driven by piezoelectric actuators is presented. A pair of quadruple gratings and a quadruple photo-detector are used. The difference between the two 0-th order moire signals in reflection with a relative spatial phase of 180.deg. is used in each direction to control the alignment of the X-Y-.theta. stage. The stage is aligned at the position where the difference is zero. The quadruple gratings are 10 mm * 10 mm, and of a binary square-type with a 1/2 duty cycle. Their pitches are 16 .mu.m. Alignment accuracy of .+-.20nm was obtained in this system.
Keywords