대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

Pyrosol법에 의한 ZnO박막의 실험 조건과 특성의 상관성

The relationship between exeperimental conditions and properties of ZnO thin films prepared by Pyrosol deposition method

  • 강기환 (한국에너지기술연구소 태양전지 연구팀) ;
  • 송진수 (한국에너지기술연구소 태양전지 연구팀) ;
  • 유권종 (한국에너지기술연구소 태양전지 연구팀) ;
  • 조우영 (KAIST 전기및 전자공학과) ;
  • 임굉수 (KAIST 전기및 전자공학과)
  • 발행 : 1993.07.18
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초록

Undoped ZnO films were prepared on Soda lime glass using pyrosol deposition method starting from the solutions composed of $ZnO(CH_3COO){_2}\;2H_2O-H_2O-CH_3OH$. Surface morphology revealed ZnO films were polycrystalline above $400^{\circ}C$ substrate temperature in $H_2O$ only solvent $H_2O-CH_3OH$ solvent revealed more good result than $H_2O$ only solvent. the lowest resistivity of as-deposit ZnO films was 4 ${\Omega}$-Cm and transmittance at 550nm was 85%. post-annealing of as-deposited films in a vacuum leads to s reduction in resistivity without affecting the optical transmittance.

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