Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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The relationship between exeperimental conditions and properties of ZnO thin films prepared by Pyrosol deposition method

Pyrosol법에 의한 ZnO박막의 실험 조건과 특성의 상관성

  • 강기환 (한국에너지기술연구소 태양전지 연구팀) ;
  • 송진수 (한국에너지기술연구소 태양전지 연구팀) ;
  • 유권종 (한국에너지기술연구소 태양전지 연구팀) ;
  • 조우영 (KAIST 전기및 전자공학과) ;
  • 임굉수 (KAIST 전기및 전자공학과)
  • Published : 1993.07.18
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Abstract

Undoped ZnO films were prepared on Soda lime glass using pyrosol deposition method starting from the solutions composed of $ZnO(CH_3COO){_2}\;2H_2O-H_2O-CH_3OH$. Surface morphology revealed ZnO films were polycrystalline above $400^{\circ}C$ substrate temperature in $H_2O$ only solvent $H_2O-CH_3OH$ solvent revealed more good result than $H_2O$ only solvent. the lowest resistivity of as-deposit ZnO films was 4 ${\Omega}$-Cm and transmittance at 550nm was 85%. post-annealing of as-deposited films in a vacuum leads to s reduction in resistivity without affecting the optical transmittance.

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