대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

$TiO_2-Nb_2O_5$ 박막형 습도센서의 개발에 관한 연구(I)

A Study on the Development of $TiO_2-Nb_2O_5$ Thin Film Type Humidity Sensors(I)

  • Jin, Y.Y. (Dept. of Electrical Eng. Inha Univ.) ;
  • You, D.H. (Dept. of Electrical Eng. Inha Univ.) ;
  • Kim, Y.B. (Dept. of Electrical Eng. Inha Tech. Junior Col.) ;
  • Kang, D.H. (Dept. of Electrical Eng. Pusan National University of Technology) ;
  • Cho, K.S. (Dept. of Electrical Eng. Yuhan Junior Col.) ;
  • Shin, T.H. (Dept. of Electrical Eng. Yuhan Junior Col.) ;
  • Lee, D.C. (Dept. of Electrical Eng. Inha Univ.)
  • 발행 : 1993.07.18
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초록

$TiO_2-Nb_2O_5$ thin films are fabricated by Sol-Gel method and their electrical properties have been investigated. The crystalline form is amorphous under $400^{\circ}C$ and is anatase over $500^{\circ}C$. The surface conductivity of films is higher that of $500^{\circ}C$ than that of $600^{\circ}C$.

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