Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A study on the fabrication and properties of $TiO_2$ thin films by Sol-Gel Method

Sol-Gel 법에 의한 $TiO_2$ 박막의 제조 및 물성에 관한 연구

  • You, D.H. (Dept. of Electrical Eng. Inha Univ.) ;
  • Kim, J.S. (Dept. of Technical Education, Korea National Univ. of Education) ;
  • Kang, D.H. (Dept. of Electrical Eng. Pusan Industrial Col.) ;
  • Kim, Y.H. (Dept. of Electrical Eng. Kyungwon Industrial Col.) ;
  • Lee, D.C. (Dept. of Electrical Eng. Inha Univ.)
  • Published : 1992.11.07
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Abstract

In this study, $TiO_2$ thin films are fabricated by Sol-Gel method and dielectric, electric and humidity sensing properties have been investigated. The structure of Sol can be changed by controlling for hydrolysis reaction condition. The uniformity of the surface on $TiO_2$ thin films is confirmed by SEM. The permittivity of $TiO_2$ thin films increases according to heat treatment temperature, whereas the conductivity of $TiO_2$ thin films decreases according to heat treatment temperature, As the results of measuring humidity sensing properties of $TiO_2$ thin films fabricated as humidity sensor, it is confirmed to have good humidity sensing properties in high humidity and low frequency.

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