Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1992.11a
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- Pages.22-27
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- 1992
Properties of Phosphorus Doped ${\mu}c$ -Si:H Thin Films Prepared by PECVD
PECVD에 의하여 제조된 Phosphorus-Doped ${\mu}c$ -Si:H 박막의 특성
Abstract
Phosphorus doped hydrogenated microcrystalline silicon (
Keywords