Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1992.05b
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- Pages.158-158
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- 1992
Deposition of $Si_{3}N_{4}$ on Si and InP by PECVD
Si 및 InP 위에 PECVD법에 의한 $Si_{3}N_{4}$ 의 증착
Abstract
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