Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1992.05b
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- Pages.151-151
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- 1992
A Study about the Tantalum Oxide Film Properties Changed with the Deposition Temperature
증착 온도에 따른 Tantalum Oxide 막의 성질 변화 연구
Abstract
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