한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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자기정열 방식을 이용한 X-cut LiNbO$_3$ 광 변조기 제작과 특성

Fabrication and characterization of X-cut LiNbO$_3$optical modulator using self-aligned method

  • 강기성 (명지대학교 전자공학과) ;
  • 채기병 (명지대학교 전자공학과) ;
  • 소대화 (명지대학교 전자공학과)
  • 발행 : 1992.05.01
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초록

An electro-optical single modulator is fabricated in X-cut LiNbO$_3$by the annealed proton exchange and self-aligned method. First, the effect of annealing is characterized by examining single optical modulator. It is found that by controlling the annealing time, the single optical modulator can be made widely variable. The on-off state of modulator is performed by annealing process and self-aligned electrodes are used in fabricating the single modulator. The optical single modulator has very good figures of merits : the measured on-off switching voltage of about 2.7V.

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