Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1992.02a
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- Pages.97-97
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- 1992
Studies on Microvoids at the Interface of Direct Bonded Silicon Wafers
- Sun Jin Yun (ETRI) ;
- Kun-Young Ahn (ETRI) ;
- Kyoung-Soo Yi (ETRI) ;
- Sang-Won Kang (ETRI)
- Published : 1992.02.01
Abstract
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