Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1991.11a
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- Pages.299-303
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- 1991
Design and Implementation of Lamp-Heated LPCVD System
램프 가열 방식 LPCVD 장비의 설계 및 제작
- Ha, Yong-Min (Korea Advanced Institute of Science and Technology) ;
- Kim, Tae-Sung (Korea Advanced Institute of Science and Technology) ;
- Kim, Choong-Ki (Korea Advanced Institute of Science and Technology)
- Published : 1991.11.22
Abstract
A lamp heated LPCVD equipment has been made. Wafer is heated by an array of fifteen tungsten halogen lamps above the front side of a wafer and pyrometer views the back side of the wafer through
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