Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 1991.06a
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- Pages.110-114
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- 1991
Fabrication of Y-cut LiNbO$_3$ Mach-Zehnder Interferometric Modulator using Proton Diffusion Process
양자확산 공정을 이용한 Y-cut LiNbO$_3$ 마하젠더 간섭계형 변조기 제작
Abstract
A guided-wave electrooptic Mach-Zehnder interferometric modulator was fabricated on Y-cut acoustic grade LiNbO3 process. In order to reduce the electrode capacitance, serial capacitance electrode(SCE) structure was adopted. Extinction ratio more than 30dB was obtained with V
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