Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1989.11a
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- Pages.497-501
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- 1989
An Experimental Study on the Mechanisms of Meltback and Regrowth
용액식각후 재결정성장의 기구에 대한 실험적 고찰
- Hahm, Sung-Ho (Dept. of Elec. Eng., KAIST) ;
- Yoo, Tae-Kyung (Central Research Lab., Gold-Star Co.) ;
- Cho, Gyu-Seog (Dept. of Elec. Eng., KAIST) ;
- Kwon, Young-Se (Dept. of Elec. Eng., KAIST)
- Published : 1989.11.25
Abstract
The mechanisms of the meltback etching and regrowth processes are studied experimentally. The method to reduce the anisotropy and elliminate the gallium islands in the processes are developed. It is possible to fabricate the GaAs optical devices by the use of the process.
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