Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1989.11a
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- Pages.139-141
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- 1989
A study of the hollow cathode discharge
HOLLOW CATHODE DISCHARGE의 방전 특성 연구
Abstract
The characteristics of the hollow cathode discharge were investigated. Temperature distribution of the hollow cathode was investigated and I-V curves of the hollow cathode discharge were obtained. In this paper variables are chamber pressure, Ar gas flow rate injected through the cathode tube and the gap distance between cathode and anode. The inter electrode electron temperature and density were measured by Langmuir probe.
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