Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 1989.02a
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- Pages.180-184
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- 1989
GaAs OEIC Unit Processes for chip-to-chip Interconnection I (OEIC overview ; Zn-diffusion ; SL layer growing)
칩상호 광접속용 GaAs 광전집적회로의 기본 공정 I (OEIC 개관;Zn-확산;SL 제작을 위한 초박막 성장)
Abstract
Overviews of vertical and horizontal GaAs/AlGaAs OEIC are shown. Researching double Zn diffusion process, we obtain Xj=At1/2-Bd1, where A=2.5
Keywords