Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 1989.02a
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- Pages.65-69
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- 1989
The study on X-ray generation in the Coaxial Plasma focus Device
동축 플라즈마 집속장치에서의 x-선 방출에 관한 연구
Abstract
Mather type dense plasma focus device was develooped for the feasibili쇼 study in its application to the x-ray lithography. To etermine the electrical characteristics,the temporal begavior of the discharge current and the voltage was measured by using the Rogowski coil and the high voltage probe respectively. The results are 9
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