대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1989년도 하계종합학술대회 논문집
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- Pages.662-666
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- 1989
$CO_2$ Laser-induced CVD법에 의한 Silicon박막 및 p-n 접합 Silicon제작
Silicon thin film and p-n junction diode made by $CO_2$ laser-induced CVD method
초록
Pure mono Silane(Purity: 99.99%) was used as a thin film source and [
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