Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1989.07a
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- Pages.642-646
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- 1989
Analysis of discharge characteristics of KrF laser system with UV preionization
자외선 예비전리 KrF 레이저의 방전특성 해석
- Choi, Boo-Yeon (Kyung Hee Univ) ;
- Lee, Choo-Hie (Kyung Hee Univ)
- Published : 1989.07.21
Abstract
We have developed analysis program of discharge chracteristics of KrF laser system with charge transfer type, that studied about deposited energy, nonlinear discharge, and electron number density in the laser tube. With this program, voltagr, current, and deposited energy was calculated 27 KV,32.6 KA,200 MW at total pressure 2 atm and charging voltage 33 KV, respectively. At this condition, circuit parameters are L1=150nH, R1=
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