Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1989.07a
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- Pages.359-363
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- 1989
The factors involved in the wear-out of the thin oxide film
얇은 산화막의 Wear-out 현상과 제인자
- Kim, Jae-Ho (Department of Electrical Engineering, Korea University) ;
- Yi, Seung-Hwan (Department of Electrical Engineering, Korea University) ;
- Kim, Chun-Sub (Department of Electrical Engineering, Korea University) ;
- Sung, Yung-Kwon (Department of Electrical Engineering, Korea University)
- Published : 1989.07.21
Abstract
Recently, it is reported that the behavior of thermal
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