한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1988년도 춘계학술대회 논문집
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- Pages.78-81
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- 1988
Nitoxide막에 의한 표면 불활성화에 관한 연구
A Study on the passivation of Si by Thermal Ammonia Nitroxide
- Sung, Yung-Kwon (Dept. of Electrical Eng., Korea University) ;
- Choi, Jong-Il (Dept. of Electrical Eng., Korea University) ;
- Oh, Jae-Ha (Dept. of Electrical Eng., Korea University)
- 발행 : 1988.05.27
초록
Nitroxide films were made from the
키워드