제어로봇시스템학회:학술대회논문집
- 1988.10b
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- Pages.964-968
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- 1988
Servo control system of electrostatic micro-actuator for micro robots
- Sim, Kwee-Bo (Institute of Industrial Science, Univ. of Tokyo) ;
- Hashimoto, Hideki (Institute of Industrial Science, Univ. of Tokyo) ;
- Fujita, Hiroyuki (Institute of Industrial Science, Univ. of Tokyo)
- Published : 1988.10.01
Abstract
In mechanical systems in which the dynamics of armatures is dominated by electrostatic forces, motions will generally be unstable. This paper deals with the control problems of this kind of micro electrostatic device systems. In these systems, the mass of micro mechanical parts is so small that the inertia term in the equation of motion is negligible. However, nonlinear terms, such as friction and driving force, become dominant. The purpose of this paper is to realize the stable motion without delay and, overshoot etc. A micro-mechanical system used in this paper consists of a plane wafer with striped electrodes converted with an insulation layer and thin cylindrical roller is placed over on it. The performance of motions is confirmed by some simulations.
Keywords