제어로봇시스템학회:학술대회논문집
- 제어로봇시스템학회 1988년도 한국자동제어학술회의논문집(국내학술편); 한국전력공사연수원, 서울; 21-22 Oct. 1988
- /
- Pages.401-406
- /
- 1988
반도체 공정정보 관리 시스템 개발
Development of semiconductor process information system
초록
Various types and huge volume of information such as process instructions, work-in process and parametric data are created in a wafer fabrication process and should be provided to personnels inside or outside the facility. This article describes design criteria and functional description on the information system for small-scale wafer fabrication process to accomplish paperless fab and to support efficient fab management.
키워드