대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

용량이행형 방전여기 엑사이머 레이저의 전압 전류 특성

The Characteristic of voltage and Current in Discharge-pumped Excimer Laser with Charge Transfer Type

  • 정재근 (경희대학교 전자공학과) ;
  • 최부연 (경희대학교 전자공학과) ;
  • 이주희 (경희대학교 전자공학과)
  • Jung, Jae-Keun (Dept. of Electronic Engineering, Kyung Hee University) ;
  • Choi, Boo-Yeon (Dept. of Electronic Engineering, Kyung Hee University) ;
  • Lee, Choo-Hie (Dept. of Electronic Engineering, Kyung Hee University)
  • 발행 : 1987.11.20
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초록

We calculated the discharge resistance, which is determined by plasma dynamics, of the discharge pumped excimer lasers with charge-transfer type. And investigated the characteristic of discharge voltage and current using EMIP.

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