Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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The Characteristic of voltage and Current in Discharge-pumped Excimer Laser with Charge Transfer Type

용량이행형 방전여기 엑사이머 레이저의 전압 전류 특성

  • Jung, Jae-Keun (Dept. of Electronic Engineering, Kyung Hee University) ;
  • Choi, Boo-Yeon (Dept. of Electronic Engineering, Kyung Hee University) ;
  • Lee, Choo-Hie (Dept. of Electronic Engineering, Kyung Hee University)
  • 정재근 (경희대학교 전자공학과) ;
  • 최부연 (경희대학교 전자공학과) ;
  • 이주희 (경희대학교 전자공학과)
  • Published : 1987.11.20
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Abstract

We calculated the discharge resistance, which is determined by plasma dynamics, of the discharge pumped excimer lasers with charge-transfer type. And investigated the characteristic of discharge voltage and current using EMIP.

Keywords