대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1987년도 정기총회 및 창립40주년기념 학술대회 학회본부
- /
- Pages.300-303
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- 1987
마이크로파를 이용한 플라즈마 발생에 관한 연구
A study on the generating plasma by microwave
-
Whang, Ki-Woong
(Seoul National University Electrical Engineering)
;
- Lee, Jeong-Hae (Seoul National University Electrical Engineering)
- 발행 : 1987.11.20
초록
A microwave plasma generating system has been designed to study the properties of plasma. A microwave(2.45GHz) generated by the magnetron is transmitted to the cylindrical cavity through the the rectangular wave guide to generate hydrogen plasma. The electron temperature and the plasma density are measured by the Double Langmuir probe. A dilectric such as alumina is heated by the microwave add plasma. The surface temperature varies with the neutral gas pressure.
키워드