대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1987년도 전기.전자공학 학술대회 논문집(I)
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- Pages.454-457
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- 1987
Ti-실리사이드 형성에 관한 연구
A Study on the Ti-Silicide Formation
- Kim, Hark-Gyun (Department of Metallurgical Engineering, College of Engineering, Seoul National University) ;
- Joo, Seung-Ki (Department of Metallurgical Engineering, College of Engineering, Seoul National University)
- 발행 : 1987.07.03
초록
Formation of the titanium silicides was performed by the furnace annealing. Ti-silicide was formed by reacting Ti films with singlecrystalline silicon in vacuum or nitrogen ambient in the temperature range
키워드