Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1987.07b
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- Pages.1532-1535
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- 1987
A Study on Circuit Parameter Extraction from Mask Pattern Data
마스크 패턴데이타로 부터의 회로 파라미터 추출에 관한 연구
- Lee, Jae-Seong (Dept. of Elect. Eng., Seoul City Univ.) ;
- Rho, Seung-Ryong (Dept. of Elect. Eng., Seoul City Univ.) ;
- Kim, Chul-Ju (Dept. of Elect. Eng., Seoul City Univ.)
- Published : 1987.07.03
Abstract
In this paper, we propose the algorithm for mask level simulation. The circuit parameters were extracted from the photomask data in format of bitmap. The extracted circuit parameter was transformed into the input file format of SPICE-16. And then the simulation of mask pattern data was carried out the SPICE-16. Thus the error operation of IC due to the mistake of photomask pattern could be prevented.
Keywords