Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 1986.12a
- /
- Pages.211-225
- /
- 1986
Silicon Carbide Coating by Thermal Decomposition of tetramethylsilane
Abstract
Silicon carbide coating has been studied using a graphite substrate, a mixture of tetramethylsilane and hydrogen or argon at deposition temperature (T) of 950 to
Keywords