• Title, Summary, Keyword: junction box

Search Result 54, Processing Time 0.103 seconds

Effect of hydrogen in Ni-silicide with Iodine Catalyst Deposited Ni Film by using Atomic Layer Deposition

  • Gang, Hui-Seong;Ha, Jong-Bong;Kim, Gi-Won;Kim, Dong-Seok;Im, Gi-Sik;Kim, Seong-Nam;Lee, Gwang-Man;Lee, Jeong-Hui
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • /
    • pp.234-234
    • /
    • 2010
  • 최근 CMOS 소자 크기가 축소됨에 따라 소스와 드레인 영역에서의 접촉저항을 줄이기 위하여, 실리사이드 공정이 많이 연구되고 있다. 실리사이드 물질로서 NiSi는 낮은 저항률과 낮은 실리콘 소모, 낮은 공정온도, 등의 장점을 가지고 있다. 그러나, 실리사이드 형성으로 인한 나노소자의 소오스/드레인에서정션(junction) 누설전류의 증가는 큰 문제가 되므로 실리콘과 실리사이드 계면의 특성이 중요하다. 본 연구에서는 니켈을 이용한 실리사이드 형성시 계면 활성제인 에틸 요오드를 이용하여 실험을 진행하였다. 금속 유기 전구체인 MABONi을 사용하여 ALD 방식으로 증착 한 니켈 박막과 니켈 핵 형성시 계면활성제인 에틸요오드의 처리 방법에 따른 Ni-silicide 박막의 특성을 비교, 분석하였다. 먼저 자연산화막을 건식식각으로 제거한 뒤, 첫 번째 샘플에서는 10회의 주기로 초기 니켈을 증착한 뒤, 에틸요오드로 니켈의 표면 위를 처리하고, 다시 200회의 주기로 니켈을 증착하였으며, 두 번째는 첫 번째 방식에서 에틸요오드 주입 시 동시에 수소도 함께 주입하였다. 세 번째는 비교를 위해 에틸요오드 처리를 하지 않고 니켈 박막만을 증착 하였다. 이어서, 각 샘플을 급속 열처리 장비에서 $400^{\circ}C$부터 $900^{\circ}C$까지 각각 30sec간 열처리를 진행후, 반응하지 않은 잔여 니켈을 제거한 후, XRD(x-ray diffraction), AES(auger), 그리고 4-point probe 등을 이용하여 형성된 실리사이드의 특성을 분석하였다. 에틸요오드와 함께 수소를 주입한 경우 계면에서의 산소 불순물과 카본 성분이 효과적으로 제거되어 $400^{\circ}C$에서 $2.9{\Omega}/{\Box}$ 의 낮은 면저항을 가지는 NiSi가 형성되었고 모든 온도구간에서 다른 샘플에 비하여 가장 낮은 면저항 분포를 보였다. 이는 분해 흡착된 요오드에 의한 계면 특성 향상과 카본 성분이 포함된 잔여물들이 수소처리에 의해 효율적으로 제거되어 실리사이드의 특성이 향상되었기 때문이다. 계면활성제를 사용하지 않은 경우에는 $500^{\circ}C$에서 NiSi가 형성되었다. 반면에 에틸요오드로만 표면을 처리한 경우에는 니켈과 실리콘 계면에서의 카본 성분에 의하여 silicidation 이 충분히 일어나지 않았다. 이러한 결과는 향후 45nm 이하의 CMOS 공정상에서 소스와 드레인의 낮은 누설전류를 가지고, 접촉저항을 줄이기 위한 니켈 실리사이드 형성에 큰 도움을 줄 것으로 기대된다.

  • PDF

A Study for Fire Examples Involved with Absorbing Material Breakaway and Electric Short in Engine Room of a Large Bus (대형 버스의 엔진룸에서 흡음재이탈 및 전기적인 단락에 관련된 화재 사례 고찰)

  • Lee, IL Kwon;Kook, Chang Ho;Ham, Sung Hoon;Lee, Young Suk;Hwang, Han Sub;You, Chang Bae;Moon, Hak Hoon;Lee, Jeong Ho
    • Journal of the Korean Institute of Gas
    • /
    • v.24 no.2
    • /
    • pp.9-14
    • /
    • 2020
  • This paper is a purpose to study the failure examples for a large bus vehicle fire. The first example, the researcher certified the fact that the absorbing material break away from the upper side of engine room because of weaken durability and the fire was produced in engine. The second example, it sought the fact that the fire breaks out by electric short because of over-load of compressor. The third example, it found the fact that the fire took place by heating of bellows upper part that was connected with muffler and exhaust manifold. The fourth example, it knew the fact that the fire occurred because of the electric short inside junction box of crash body part that was located to driver seat rightside. Therefore, the fire of a large bus occurring by decrepit of absorbing material and electric short have to thoroughgoingly manage the damage and dangerousness if it happens.

Clinical Investigation about the Result of Surgically Treated Myasthenia Gravis (중증 근무력증의 수술적 치료결과에 대한 임상적 고찰)

  • 김대현;황은구;조규석;김범식;박주철
    • The Korean Journal of Thoracic and Cardiovascular Surgery
    • /
    • v.36 no.1
    • /
    • pp.15-20
    • /
    • 2003
  • Myasthenia gravis is a rare autoimmune disease involving acetylcholine receptor and its autoantibody on neuromuscular junction. The methods of treatment are medical treatment and surgical thymectomy. In this paper we analyzed the result of thymectomy and the factors affecting the postoperative symptom improvement. Material and method : This study obtained medical records of 37 patients who received the thymectomy for myasthenia gravis from March 1986 to December 1998. Result Out of 37 cases, 21 cases(57%) showed improvement, of which 8 cases (50%) in the group of thymoma(n=16), and 13 cases (62%) in the group of thymic hyperplasia(n=21) showed the improvement of symptoms. Postoperative complications were respiratory insufficiency due to aggravation of symptoms after operation, including tracheal intubation for ventilator support in 9 cases, pneumonia in 3 cases, pneumothorax in 2 cases and left vocal cord palsy in 1 case. There was one postoperative mortality. The relation between postoperative improvement and sex(P=0.3222), age(P=0.7642), thymic pathologic variants,(P=0.4335) and classification of thymoma(P=0.20) showed no statistically significant correlation. However, the lower grade of preoperative symptoms can predict the lower grade of postoperative symptoms significantly(P=0.0032). Follow up study to 36 postoperative survivors was performed in October 2002 based on the out-patient records and call with patients. Out of 36 cases, 33 cases(91.7%) could be investigated and 3 cases could not. Mean follow up period was 83.2 months. Out of 33 cases, 25 cases(75.8%) showed symptomatic improvement, of which 8 cases(53.3%) in the group of thymoma(n=15) and 17 cases(94.4%) in the group of thymic hyperplasia(n=18) showed the improvement of$\boxUl$ symptoms. Conclusion : In myasthenia gravis, thymectomy showed the good improvement, and more important factor affecting the improvement of symptoms was the grdae of preoperative symptoms. Also midterm and long term follow up results showed good symptomatic improvement.

The Efficiency and Improvement of the Highway Wild-Life Fences for Decrease of Mammals Road-kill - In Case of Manjong~Hongchun Section on Jungang Highway - (포유류 로드킬 저감을 위한 고속도로 유도울타리 효율성 및 개선방안 연구 - 중앙고속도로 만종~홍천 구간을 사례로 -)

  • Song, Jeong-Seok;Lee, Kyong-Jae;Ki, Kyong-Seok;Jun, Ik-Yo
    • Korean Journal of Environment and Ecology
    • /
    • v.25 no.5
    • /
    • pp.649-657
    • /
    • 2011
  • This study had targeted the Manjong Junction~Hongchun interchange section of Jungang highway in order to analyze the efficiency and improvement of the highway wild-life fences. Being analyzed wild-life fence as an effective facility for the prevention of road-kill, it had founded that the wild animals did not jump over even the two layer guardrail, concrete barrier and noise barrier, fence for rock fall. For the section with high road-kill decrease effect after installing the wild-life fence, the effect was higher at wild-life fence with the height of 1.0m where the door had not been installed and the well connected points of road facility than the area with fence height of 1.5m. The road-kill decrease effect was also high at the well managed areas even if the door has not been installed. Also, road-kill had occurred by concentrating around the end of wild-life fence after installing the fence, Moreover road-kill had also occurred around the cutting section. The door of wild-life fence had higher amount of road-kill occurrence as the installation interval was closer. it was analyzed that the door management has a lot of effect on road-kill decrease. The fence for rock fall, two layer guardrail and concrete barrier having the effect of wild-life fence installed on the road would have to be installed by connecting with wild-life fences through proper facility improvement. Although the door should not be installed if possible, it should be installed as automatic door or gravity door to prevent the door from leaving the door open. An escape route has to be formed for the prompt escape away from the road for the animals entered through the ending section of the fence. The eco-corridor has to be made by restoring the soil layer of dual purpose eco-corridor forming a planting area. Also, the dead body after the accident has to be disposed to the outer section of the road immediately in order to prevent the secondary road-kill by the predator from the road-kill. The fence has to be installed as 500m or longer in both ways, in other words 1,000m or longer, from the targeted spot of minimum accident prevention while connecting up to the bridge or box culvert, etc that are next road facilities if possible to guide wild animals safely to the eco-corridor.