• Title, Summary, Keyword: Facing Targets puttering

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The Improvement of Magnetic Properties of Co-Cr Thin Film for Perpendicular Magnetic Recording Media (수직자기기록매체용 Co-Cr 박막의 자기적 특성 개선에 관한 연구)

  • 공석현;금민종;최형욱;최동진;김경환;손인환
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.5
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    • pp.444-450
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    • 2000
  • We prepared Co-Cr thin film for perpendicular magnetic recording media with facing targets sputtering system(FTS system) which can deposit a high quality thin film in plasma-free state and wide range of working pressure. The effect of sputtering conditions(argon gas pressure and substrate temperature) on the magnetic and the crystallographic characteristic of Co-Cr thin film was investigated. And the variation of perpendicular coercivity with the variation of film thickness was studied. As a result we obtained the high perpendicular coercivity of 1900Oe and the good dispersion angle of c-axis($\Delta$$\theta$$_{50}$) of 5$^{\circ}$on the film thickness of 100nm for the promising recording layer of perpendicular magnetic recording media.c recording media.a.

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