Machine tool errors can be divided into geometric error, thermal deformation error, and machining error. In this study, the influence of each error on the total error and the relative size of each error are quantitatively analyzed in 2D machining. The thermal deformation error and the machining error caused a relatively large error compared to the geometric error, which is directly related to the machining accuracy. In order to eliminate the error factors, the possibility of error compensation was examined by analyzing the measured error profile shape. As a result, about 40 ~ 50% error compensation was achieved for each error factor. Through this study, it is possible to construct a basic data base on machining, and it is expected that it will be able to compensate the machining error from the viewpoint of users.