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Interferometric Snapshot Spectro-ellipsometry: Calibration and Systematic Error Analysis

  • Dembele, Vamara (Division of Mechanical System Engineering, Jeonbuk National University) ;
  • Choi, Inho (Division of Mechanical System Engineering, Jeonbuk National University) ;
  • Kheiryzadehkhanghah, Saeid (Division of Mechanical System Engineering, Jeonbuk National University) ;
  • Choi, Sukhyun (Division of Mechanical System Engineering, Jeonbuk National University) ;
  • Kim, Junho (Division of Mechanical System Engineering, Jeonbuk National University) ;
  • Kim, Cheong Song (Division of Mechanical System Engineering, Jeonbuk National University) ;
  • Kim, Daesuk (Division of Mechanical System Engineering, Jeonbuk National University)
  • Received : 2020.02.05
  • Accepted : 2020.04.21
  • Published : 2020.08.25

Abstract

We describe a calibration method to improve the accuracy of interferometric snapshot spectroscopic ellipsometry employing a dual-spectrometer sensor scheme. Conventional spectral wavelength calibration of a spectrometer has been performed by using a calibration lamp having multiple peaks at specific wavelength. This paper shows that such a conventional spectrometer calibration method is inappropriate for the proposed interferometric snapshot spectroscopic ellipsometry to obtain highly accurate ellipsometric phase information. And also, systematic error analysis of interferometric snapshot spectroscopic ellipsometry is conducted experimentally.

Keywords

References

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