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Fabrication and characterization of superconducting coplanar waveguide resonators

  • Kim, Bongkeon (Department of Physics and Photon Science, Gwangju Institute of Science and Technology) ;
  • Jung, Minkyung (DGIST Research Institute, DGIST) ;
  • Kim, Jihwan (Quantum Technology Institute, Korea Research Institute of Standards and Science) ;
  • Suh, Junho (Quantum Technology Institute, Korea Research Institute of Standards and Science) ;
  • Doh, Yong-Joo (Department of Physics and Photon Science, Gwangju Institute of Science and Technology)
  • Received : 2020.11.16
  • Accepted : 2020.12.25
  • Published : 2020.12.31

Abstract

High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Qi = 4,784 and Qc = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures.

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