DOI QR코드

DOI QR Code

Two-dimensional Laser Drilling Using the Superposition of Orthogonally Polarized Images from Two Computer-generated Holograms

  • Lee, Hwihyeong (Space Optics Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science) ;
  • Cha, Seongwoo (Department of Physics, Korea Advanced Institute of Science and Technology) ;
  • Ahn, Hee Kyung (Space Optics Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science) ;
  • Kong, Hong Jin (Department of Physics, Korea Advanced Institute of Science and Technology)
  • Received : 2019.05.22
  • Accepted : 2019.07.30
  • Published : 2019.10.25

Abstract

Laser processing using holograms can greatly improve processing speed, by spatially distributing the laser energy on the target material. However, it is difficult to reconstruct an image with arrays of closely spaced spots for laser processing, because the specklelike interference pattern prevents the spots from getting close to each other. To resolve this problem, a line target was divided in two, reconstructed with orthogonally polarized beams, and then superposed. Their optical reconstruction was performed by computer-generated holograms and a pulsed laser. With this method, we performed two-dimensional (2D) laser drilling of polyimide film, with a kerf width of $20{\mu}m$ and a total processing length of 20 mm.

Keywords

Laser processing;Materials processing;Computer-generated holograms;Diffractive optical element

Acknowledgement

Supported by : Civil Military Technology Cooperation Center (CMTC) of Korea

References

  1. D. Belforte, Industrial lasers continue solid revenue growth in 2016 (Industrial Laser Solutions for Manufacturing, 18 Jan 2017), https://www.industrial-lasers.com/micromachining/article/16485081/industrial-lasers-continue-solid-revenue-growth-in-2016 (5 Oct 2017).
  2. A. Salama, L. Li, P. Mativenga, and A. Sabli, "High-power picosecond laser drilling/machining of carbon fibre-reinforced polymer (CFRP) composites," Appl. Phys. A 122, 73 (2016).
  3. M. Vala and J. Homola, "Multiple beam interference lithography: A tool for rapid fabrication of plasmonic arrays of arbitrary shaped nanomotifs," Opt. Express 24, 15656-15665 (2016). https://doi.org/10.1364/OE.24.015656
  4. K. Miyazaki, G. Miyaji, and T. Inoue, "Nanograting formation on metals in air with interfering femtosecond laser pulses," Appl. Phys. Lett. 107, 071103 (2015). https://doi.org/10.1063/1.4928670
  5. P. S. Salter and M. J. Booth, "Addressable microlens array for parallel laser microfabrication," Opt. Lett. 36, 2302-2304 (2011). https://doi.org/10.1364/OL.36.002302
  6. J. Kato, N. Takeyasu, Y. Adachi, H.-B. Sun, and S. Kawata, "Multiple-spot parallel processing for laser micronanofabrication," Appl. Phys. Lett. 86, 044102 (2005). https://doi.org/10.1063/1.1855404
  7. Z. Kuang, W. Perrie, D. Liu, P. Fitzsimons, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, "Ultrashort pulse laser patterning of indium tin oxide thin films on glass by uniform diffractive beam patterns," Appl. Surf. Sci. 258, 7601-7606 (2012). https://doi.org/10.1016/j.apsusc.2012.04.099
  8. Y. Jin, W. Perrie, P. Harris, O. J. Allegre, K. J. Abrams, and G. Dearden, "Patterning of Aluminium thin film on polyethylene terephthalate by multi-beam picosecond laser," Opt. Lasers Eng. 74, 67-74 (2015). https://doi.org/10.1016/j.optlaseng.2015.04.006
  9. S. Hasegawa, H. Ito, H. Toyoda, and Y. Hayasaki, "Massively parallel femtosecond laser processing," Opt. Express 24, 18513-18524 (2016). https://doi.org/10.1364/OE.24.018513
  10. K. L. Wlodarczyk, M. Ardron, N. J. Weston, and D. P. Hand, "Holographic watermarks and steganographic markings for combating the counterfeiting practices of high-value metal products," J. Mater. Process. Technol. 264, 328-335 (2019). https://doi.org/10.1016/j.jmatprotec.2018.09.020
  11. P. Kunwar, L. Turquet, J. Hassinen, R. H. A. Ras, J. Toivonen, and G. Bautista, "Holographic patterning of fluorescent microstructures comprising silver nanoclusters," Opt. Mater. Express 6, 946-951 (2016). https://doi.org/10.1364/OME.6.000946
  12. K. L. Wlodarczyk and D. P. Hand, "Shaping the surface of Borofloat 33 glass with ultrashort laser pulses and a spatial light modulator," Appl. Opt. 53, 1759-1765 (2014). https://doi.org/10.1364/AO.53.001759
  13. T. Häfner, J. Heberle, D. Holder, and M. Schmidt, "Speckle reduction techniques in holographic beam shaping for accurate and efficient picosecond laser structuring," J. Laser Appl. 29, 022205 (2017). https://doi.org/10.2351/1.4983497
  14. L. Busing, S. Eifel, and P. Loosen, "Design, alignment and applications of optical systems for parallel processing with ultra-short laser pulses," Proc. SPIE 9131, 91310C (2014).
  15. J. J. J. Kaakkunen, P. Laakso, and V. Kujanpaa, "Adaptive multibeam laser cutting of thin steel sheets with fiber laser using spatial light modulator," J. Laser Appl. 26, 032008 (2014). https://doi.org/10.2351/1.4883935
  16. C. Mauclair, D. Pietroy, Y. Di Maio, E. Baubeau, J.-P. Colombier, R. Stoian, and F. Pigeon, "Ultrafast laser microcutting of stainless steel and PZT using a modulated line of multiple foci formed by spatial beam shaping," Opt. Lasers Eng. 67, 212-217 (2015). https://doi.org/10.1016/j.optlaseng.2014.11.018
  17. K. S. Hansen, F. O. Olsen, M. Kristiansen, and O. Madsen, "Joining of multiple sheets in a butt-joint configuration using single pass laser welding with multiple spots," J. Laser Appl. 27, 032011 (2015). https://doi.org/10.2351/1.4922222
  18. J. W. Goodman, "Some fundamental properties of speckle," J. Opt. Soc. Am. 66, 1145-1150 (1976). https://doi.org/10.1364/JOSA.66.001145
  19. B. C. Kress and P. Meyrueis, Applied Digital Optics: From Micro-Optics to Nanophotonics (John Wiley & Sons, London, UK, 2009).
  20. L. Golan and S. Shoham, "Speckle elimination using shiftaveraging in high-rate holographic projection," Opt. Express 17, 1330-1339 (2009). https://doi.org/10.1364/OE.17.001330
  21. J. Amako, H. Miura, and T. Sonehara, "Speckle-noise reduction on kinoform reconstruction using a phase-only spatial light modulator," Appl. Opt. 34, 3165-3171 (1995). https://doi.org/10.1364/AO.34.003165
  22. Y. Takaki and M. Yokouchi, "Speckle-free and grayscale hologram reconstruction using time-multiplexing technique," Opt. Express 19, 7567-7579 (2011). https://doi.org/10.1364/OE.19.007567
  23. M. Makowski, "Minimized speckle noise in lens-less holographic projection by pixel separation," Opt. Express 21, 29205-29216 (2013). https://doi.org/10.1364/OE.21.029205
  24. H. Lee, S. Park, B. G. Jeon, and H. J. Kong, "Reconstruction of static line images with reduced speckle using interlaced holograms for holographic laser cutting," Appl. Phys. B 122, 192 (2016).
  25. J. Bengtsson, "Kinoform design with an optimal-rotation-angle method," Appl. Opt. 33, 6879-6884 (1994). https://doi.org/10.1364/AO.33.006879
  26. M. T. Gale, M. Rossi, J. Pedersen, and H. Schuetz, "Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists," Opt. Eng. 33, 3556-3567 (1994). https://doi.org/10.1117/12.179892
  27. I. Alexeev, J. Strauss, A. Groschl, K. Cvecek, and M. Schmidt, "Laser focus positioning method with submicrometer accuracy," Appl. Opt. 52, 415-421 (2013). https://doi.org/10.1364/AO.52.000415
  28. J. Meijer, "Laser beam machining (LBM), state of the art and new opportunities," J. Mater. Process. Technol. 149, 2-17 (2004). https://doi.org/10.1016/j.jmatprotec.2004.02.003
  29. K. C. Phillips, H. H. Gandhi, E. Mazur, and S. K. Sundaram, "Ultrafast laser processing of materials: a review," Adv. Opt. Photonics 7, 684-712 (2015). https://doi.org/10.1364/AOP.7.000684
  30. R. Schaeffer, Fundamentals of laser Micromachining (CRC press, Boca Raton, USA, 2012), Chapter 2.
  31. S. Jiang, "ASJ singulating micro SD cards," in Proc. 2009 American WJTA Conference and Expo (Waterjet Technology Association, Texas, Aug, 2009). Vol. 2, Paper A.