Modal Analysis and Design of Silicon Nitride Rib Waveguides for Evanescent-wave Bimodal Biosensors

  • Jung, Hongsik (Department of Electronic and Electrical Fusion Engineering, Hongik University)
  • Received : 2019.06.28
  • Accepted : 2019.08.08
  • Published : 2019.10.25


$Si_3N_4$ rib optical waveguides suitable for evanescent-wave photonic biosensors are analyzed to derive the conditions for single-mode propagation. A photonic biosensor structure at a wavelength of $0.63{\mu}m$ based on two-mode interference is proposed, and the rib width, rib thickness and rib-core thickness for single-mode and two-mode waveguides (corresponding to sensing region) are proposed to be $3{\mu}m$, 2 nm, and 150 nm, and $3{\mu}m$, 2 nm, and 340 nm, respectively. The optical characteristics and propagation of each guided-wave mode are investigated utilizing the film-mode-matching and eigenmode-expansion methods.


Integrated-optic photonic biosensor;$Si_3N_4$ rib optical waveguide;Two-mode interference;Evanescent wave;Film mode-matching analysis


Supported by : National Research Foundation of Korea (KNRF)


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