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Development of Volatile Organic Compound Pretreatment Device for Removing Exhaust Gas from Display Manufacturing Process

Display 제조공정 배출가스 처리를 위한 휘발성 유기화합물 전처리 장치 개발

  • Moon, Gi-Hak (Department of Environmental Engineering, Chungbuk National University) ;
  • Kim, Jae-Yong (Department of Environmental Engineering, Chungbuk National University)
  • 문기학 (충북대학교 환경공학과) ;
  • 김재용 (충북대학교 환경공학과)
  • Received : 2018.12.07
  • Accepted : 2019.01.28
  • Published : 2019.10.10

Abstract

In this study, we investigated the pretreatment technologies of volatile organic compounds (VOCs) which is a problem as the semiconductor and display industry develops recently. The conventional concentrator used in the direct combustion system, is easily contaminated by the exhaust gas in the manufacturing process of the display, resulting in the low treatment efficiency of generated VOCs. Physical/Chemical analyses of the exhaust gas showed high boiling point and viscosity in addition to a large amount of molecular weight alcohols and oil components. In this study, we tried to treat degrading materials by using the heat exchanger in a pretreatment facility and some materials degrading the concentrator were condensed more than 90%. In addition, it was also confirmed that an auxiliary device of the grease filter could remove the redispersion polymer oil from the heat exchanger.

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