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Fabrication of 365 nm Wavelength High Transmittance Silicone Resin TIR Lens and High Directivity Light Source Module for Exposure System

365 nm 파장대역 고투과율 실리콘 수지 TIR 렌즈 및 고지향성 노광기 광원모듈 제작

  • Sung, Jun Ho (Department of Electronic Engineering, Sunmoon University) ;
  • Yu, Soon Jae (Department of Electronic Engineering, Sunmoon University) ;
  • Anil, Kawan (Department of Electronic Engineering, Sunmoon University) ;
  • Jung, Mee Suk (Department of Nano-optical Engineering, Korea Polytechnic University)
  • 성준호 (선문대학교 전자공학과 광전자반도체연구실) ;
  • 유순재 (선문대학교 전자공학과 광전자반도체연구실) ;
  • ;
  • 정미숙 (한국산업기술대학교 나노-광 공학과)
  • Received : 2018.01.29
  • Accepted : 2018.03.06
  • Published : 2018.05.01

Abstract

A high directivity TIR (total internal reflection) lens in the UV-A region was designed using a silicone resin, and a UV light source module with a maximum irradiation density of $150mW/cm^2$ was fabricated. The beam angle of the TIR lens was designed to be $8.04^{\circ}$ and the maximum diameter of the TIR lens was Ø13.5. A silicone resin having a UV transmittance of 93% and a refractive index of 1.4 at a wavelength of 365 nm was used, and the lens was manufactured using an aluminum mold, from which silicone could be easily released. The module was fabricated in a metal printed circuit board of COB (chip on board) type using a $0.75{\times}0.75mm^2$ UV chip. A jig was used to adjust the focal length between lens and chip and to fix the position of the lens. The optical characteristics such as illumination distributions of the lens and module were designed using 'LightTools' optical simulation software. The heat dissipation system was designed to use a forced-air cooling method using a heat-sink and fan.

Acknowledgement

Supported by : 한국산업기술평가관리원(KEIT)

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