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Electrical Characteristics of SiC Lateral P-i-N Diodes Fabricated on SiC Semi-Insulating Substrate

  • Kim, Hyoung Woo ;
  • Seok, Ogyun ;
  • Moon, Jeong Hyun ;
  • Bahng, Wook ;
  • Jo, Jungyol
  • Received : 2017.07.11
  • Accepted : 2017.08.04
  • Published : 2018.01.01

Abstract

Static characteristics of SiC (silicon carbide) lateral p-i-n diodes implemented on semi-insulating substrate without an epitaxial layer are inVestigated. On-axis SiC HPSI (high purity semi-insulating) and VDSI (Vanadium doped semi-insulating) substrates are used to fabricate the lateral p-i-n diode. The space between anode and cathode ($L_{AC}$) is Varied from 5 to $20{\mu}m$ to inVestigate the effect of intrinsic-region length on static characteristics. Maximum breakdown Voltages of HPSI and VDSI are 1117 and 841 V at $L_{AC}=20{\mu}m$, respectiVely. Due to the doped Vanadium ions in VDSI substrate, diffusion length of carriers in the VDSI substrate is less than that of the HPSI substrate. A forward Voltage drop of the diode implemented on VDSI substrate is 12 V at the forward current of $1{\mu}A$, which is higher than 2.5 V of the diode implemented on HPSI substrate.

Keywords

Silicon carbide;Semi-insulating;Lateral power device;High purity semi-insulating;Vnadium doped semi-insulating

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Acknowledgement

Grant : The Strategic Core Material Technology Development Program

Supported by : Ministry of Trade, Industry & Energy (MI)