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Development of Levitation Control for High Accuracy Magnetic Levitation Transport System

초정밀 자기부상 이송장치의 부상제어기 개발

  • Ha, Chang-Wan (Department of Magnetic Levitation and Linear Drive, Korea Institute of Machinery & Material) ;
  • Kim, Chang-Hyun (Department of Magnetic Levitation and Linear Drive, Korea Institute of Machinery & Material) ;
  • Lim, Jaewon (Department of Magnetic Levitation and Linear Drive, Korea Institute of Machinery & Material)
  • 하창완 (한국기계연구원 자기부상연구실) ;
  • 김창현 (한국기계연구원 자기부상연구실) ;
  • 임재원 (한국기계연구원 자기부상연구실)
  • Received : 2016.04.26
  • Accepted : 2016.06.09
  • Published : 2016.07.01

Abstract

Recently, in the manufacturing process of flat panel displays, mass production methods of inline system has been emerged. In particular the next generation OLED display manufacturing process, horizontal inline evaporation process has been tried. It is important for the success of OLED inline evaporation process to develop a magnetic levitation transport system capable of transferring a carrier equipped with a mother glass with high accuracy without any physical contact along the rail under vacuum condition. In the case of existing wheel-based transfer system, it is not suitable for OLED evaporation process requiring high cleanliness. On the other hand, the magnetic levitation transport system has an advantage that it does not generate any dust and it is possible to achieve high-precision control because there are not non-linear factors such as friction force. In this paper, we introduce the high-precision magnetic levitation transport system, which is currently under development, for OLED evaporation process.

Acknowledgement

Grant : 기계시스템의 안전 신뢰성 향상기술 개발

Supported by : 한국기계연구원

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