Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Energy Harvesting Characteristics of Interdigitated (IDT) Electrode Pattern Embedded Piezoelectric Energy Harvester

IDT 전극 패턴 임베디드 압전 에너지 하베스터의 특성

  • Lee, Min-seon (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Chang-Il (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Yun, Ji-sun (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Park, Woon Ik (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Hong, Youn-Woo (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Paik, Jong Hoo (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Cho, Jeong Ho (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Park, Yong-Ho (Department of Material Science and Engineering, Pusan University) ;
  • Jang, Yong-Ho (Technology & Research Center, Senbool Corporation) ;
  • Choi, Beom-Jin (Technology & Research Center, Senbool Corporation) ;
  • Jeong, Young-Hun (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology)
  • 이민선 (한국세라믹기술원 전자소재부품센터) ;
  • 김창일 (한국세라믹기술원 전자소재부품센터) ;
  • 윤지선 (한국세라믹기술원 전자소재부품센터) ;
  • 박운익 (한국세라믹기술원 전자소재부품센터) ;
  • 홍연우 (한국세라믹기술원 전자소재부품센터) ;
  • 백종후 (한국세라믹기술원 전자소재부품센터) ;
  • 조정호 (한국세라믹기술원 전자소재부품센터) ;
  • 박용호 (부산대학교 재료공학과) ;
  • 장용호 ((주)센불 기술연구소) ;
  • 최범진 ((주)센불 기술연구소) ;
  • 정영훈 (한국세라믹기술원 전자소재부품센터)
  • Received : 2016.07.13
  • Accepted : 2016.08.01
  • Published : 2016.09.01

Abstract

Piezoelectric thick films of a soft $Pb(Zr,Ti)O_3$ (PZT) based commercial material were produced by a conventional tape casting method. Thereafter, the interdigitated (IDT) Ag-Pd electrode pattern was printed on the $25{\mu}m$ thick piezoelectric film at room temperature. Co-firing of the 10-layer laminated piezoelectric thick films was conducted at $1,100^{\circ}C$ and $1,150^{\circ}C$ for 1 h, respectively. Piezoelectric cantilever energy harvesters were successfully fabricated using the IDT electrode pattern embedded piezoelectric laminates for 3-3 operation mode. Their energy harvesting characteristics were investigated with an excitation of 120 Hz and 1 g under various resistive loads (ranging from $10k{\Omega}$ to $200k{\Omega}$). A parabolic increase of voltage and a linear decrease of current were shown with an increase of resistive load for all the energy harvesters. In particular, a high output power of 3.64 mW at $100k{\Omega}$ was obtained from the energy harvester (sintered at $1,150^{\circ}C$).

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Acknowledgement

Supported by : 한국에너지기술평가원(KETEP)

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