Improvement on Surface and Electrical Properties of Polymer Insulator Coated TiO2 Thin Film by Atomic Layer Deposition

원자층 증착장치에 의한 TiO2 박막 코팅된 폴리머 절연체의 표면 및 전기적 특성의 향상

  • Kim, Nam-Hoon (Department of Electrical Engineering, Chosun University) ;
  • Park, Yong Seob (Department of Electronics, Chosun College of Science and Technology)
  • 김남훈 (조선대학교 전기공학과) ;
  • 박용섭 (조선이공대학교 전자과)
  • Received : 2016.06.02
  • Accepted : 2016.06.13
  • Published : 2016.07.01


Titanium oxide ($TiO_2$) thin films were synthesized on polymer insulator and Si substrates by atomic layer deposition (ALD) method. The surface and electrical properties of $TiO_2$ films synthesized at various ALD cycle numbers were investigated. The synthesized $TiO_2$ films exhibited higher contact angle and smooth surface. The contact angle of $TiO_2$ films was increased with the increase of ALD-cycle number. Also, the rms surface roughness of films was slightly rough with the increase of ALD-cycle number. The leakage current on $TiO_2$ film surface synthesized at various conditions were uniformed, and the values were decreased with the increase of ALD-cycle number. In the results, the performance of $TiO_2$ films for self-cleaning critically depended on a number of ALD-cycle.


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