# ESD 전극을 이용한 분무코팅 균일도 개선에 관한 연구

• Received : 2016.01.14
• Accepted : 2016.03.28
• Published : 2016.04.30
• 36 59

#### Abstract

In this study, experiments are conducted to improve spray coating uniformity by using second and third electrodes based on the electrospray atomization mechanism. The uniformity of fabricated thin films can be improved by adjusting the design of the second electrode. The implementation of the second electrode with an elongated hole and a bending angle of $90^{\circ}$ results in highly uniform films. In addition, induced area to substrate is increased by lowering the applied voltage using the third electrode with a round rod shape. A linear correlation between applied voltage and induced area is confirmed. Thin film thickness and surface roughness are measured after the fabrication of thin films through the electrospray process. It is confirmed that a thin film is formed having an average thickness of 273.44 nm, a thickness uniformity of less than 10%, and a surface roughness of 3 nm.

#### Keywords

Electrospray Deposition;Multi Nozzle;Thin Film Coating;Atomization;Coating Uniformity

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#### Acknowledgement

Supported by : 제주대학교