DOI QR코드

DOI QR Code

Hydrogen Detection of Titanium Dioxide Layer Formed by Reactive Sputtering on SiC Substrates

SiC 기판상에 반응 스퍼터링에 의해 형성된 TiO2막의 수소가스 검지 특성

  • Kim, Seong-Jeen (Department of Electronic Engineering, Kyungnam University)
  • 김성진 (경남대학교 전자공학과)
  • Received : 2016.08.31
  • Accepted : 2016.11.04
  • Published : 2016.12.01

Abstract

We investigated a SiC-based hydrogen gas sensor with MIS (metal-insulator-semiconductor) structure for high temperature applications. The sensor was fabricated by $Pd/TiO_2/SiC$ structure, and a thin titanium dioxide ($TiO_2$) layer was exploited for sensitivity improvement. In the experiment, dependences of I-V characteristics and capacitance response properties on hydrogen gas concentrations from 0 to 2,000 ppm were analyzed at room temperature to $400^{\circ}C$. As the result, our sensor using $TiO_2$ dielectric layer showed possibilities with regard to use in hydrogen gas sensors for high-temperature applications.

Acknowledgement

Supported by : 한국연구재단

References

  1. C. Lu and Z. Chen, Sens. Actuator B Chem., 140, 109 (2009). [DOI: https:/doi.org/10.1016/j.snb.2009.04.004] https://doi.org/10.1016/j.snb.2009.04.004
  2. R. N. Ghosh and P. Tobias, J. Electron. Mater., 34, 345 (2005). [DOI: https:/doi.org/10.1007/s11664-005-0108-3] https://doi.org/10.1007/s11664-005-0108-3
  3. A. L Spetz, A. Baranzahi, P. Tobias, and I. Lundstrom, Phys. Status Solid A Appl. Res., 162, 493 (1997). https://doi.org/10.1002/1521-396X(199707)162:1<493::AID-PSSA493>3.0.CO;2-C
  4. A. Kumar, P. Zhang, A. Vincent, R. M. Cormack, R. Kalyanaraman, H. J. Cho, and S. Seal, Sens. Actuator B Chem., 155, 884 (2011). [DOI: https:/doi.org/10.1016/j.snb.2011.01.065] https://doi.org/10.1016/j.snb.2011.01.065
  5. C. Lu and Z. Chen, Int. J. Hydrog. Energy, 35, 12561 (2010). [DOI: https:/doi.org/10.1016/j.ijhydene.2010.08.031] https://doi.org/10.1016/j.ijhydene.2010.08.031
  6. A. Trinchi, S. Kandasamy, and W. Wlodarski, Sens. Actuator B Chem., 133, 705 (2008). [DOI: https:/doi.org/10.1016/j.snb.2008.03.011] https://doi.org/10.1016/j.snb.2008.03.011
  7. C. Lu and Z. Chen, Int. J. Hydrog. Energy, 35, 12561 (2010). [DOI: https:/doi.org/10.1016/j.ijhydene.2010.08.031] https://doi.org/10.1016/j.ijhydene.2010.08.031
  8. C. Loa, S. W. Tan, C. Y. Wei, J. H. Tsai, and W. S. Lour, Int. J. Hydrog. Energy, 38, 313 (2013). [DOI: https:/doi.org/10.1016/j.ijhydene.2012.10.051] https://doi.org/10.1016/j.ijhydene.2012.10.051
  9. C. Lu and Z. Chen, Sens. Actuator B Chem., 140, 109 (2009). [DOI: https:/doi.org/10.1016/j.snb.2009.04.004] https://doi.org/10.1016/j.snb.2009.04.004
  10. C. Chaneliere, J. L. Autran, A. B. Devine, and B. Balland, Mater. Sci. Eng. B Rep., 22, 269 (1998). https://doi.org/10.1016/S0927-796X(97)00023-5
  11. J. Yu, G. Chen, C. X. Li, M. Shafiei, J. Z. Ou, J. du Plessis, K. Kalantar-zadeh, P. T. Lai, and W. Wlodarski, Sens. Actuator B Chem., 172, 9 (2011). [DOI: https:/doi.org/10.1016/j.sna.2011.02.021] https://doi.org/10.1016/j.sna.2011.02.021