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Control of Explosion Behavior in Micro Hole Using UV Laser on LTCC Green Sheets Containing Carbon Particles

카본을 첨가한 LTCC 그린 시트에서 UV 레이저를 이용한 미세 홀 터짐 현상 제어

  • Kim, Shi Yeon (Department of Materials Science and Engineering, Korea University) ;
  • Ahn, Ik-Joon (Engineering Ceramic Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Yeo, Dong-Hun (Engineering Ceramic Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Shin, Hyo-Soon (Engineering Ceramic Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Yoon, Ho Gyu (Department of Materials Science and Engineering, Korea University)
  • 김시연 (고려대학교 신소재공학부) ;
  • 안익준 (한국세라믹기술원 엔지니어링세라믹센터) ;
  • 여동훈 (한국세라믹기술원 엔지니어링세라믹센터) ;
  • 신효순 (한국세라믹기술원 엔지니어링세라믹센터) ;
  • 윤호규 (고려대학교 신소재공학부)
  • Received : 2016.11.02
  • Accepted : 2016.11.21
  • Published : 2016.12.01

Abstract

Hole explosion behaviors were observed during drilling fine holes with laser beam on the LTCC green bar of $320{\mu}m$ thick after lamination of green sheets prepared by tape casting of thick film process. The incidence of these hole explosions was inversely proportional to hole sizes. The incidence of hole explosion was 20 % number of hole with the size of $60{\mu}m$ exploded for the UV radiation, while the explosion did not appear for hole sizes over $100{\mu}m$. To prevent hole explosion behavior during laser-drilling of fine holes, carbon black powder was added as an additive in the LTCC composition, which has superior thermal durability. As a consequence, hole explosion rate was suppressed to 0.8 % for the hole size of $50{\mu}m$ green sheet with the carbon black amount of 10 weight % and the laser power of 3 watt. Added carbon is thought to reduce the heat-affected region during laser drilling.

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