Non-HF Type Etching Solution for Slimming of Flat Panel Display Glass

평판디스플레이용 유리의 박판화공정을 위한 비불산형 식각액

  • Lee, Chul-Tae (Department of Chemical Engineering, Dankook University)
  • Received : 2016.01.13
  • Accepted : 2016.01.14
  • Published : 2016.02.10


The purpose of this research was to develop a flat panel display device's glass etchant which can replace hydrofluoric acid. The glass etchant was composed of 18~19% wt% of ammonium hydrogen fluoride, 24~25 wt% of sulfuric acid, 45~46 wt% of water, 4~5 wt% of sulfate and 7~8 wt% of fluoro-silicate. By replenishing the etchant which has the amount of 5% of initial solution's mass, it was possible to reuse the etchant continuously. The developed etchant showed $5{\mu}m/min$ of etching rate at $30^{\circ}C$. The reusable etchant, with replenishing 5% of initial etchant mass showed the stable etching rate, which has the deviation of less than $0.1{\mu}m/min$ etching rate. The glass surface of flat panel display device created from our etching process was in good condition with any defects such as pin hole and dimple.


Supported by : 단국대학교


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