Dynamical behaviour of electrically actuated microcantilevers

  • Farokhi, Hamed (Department of Mechanical Engineering, McGill University) ;
  • Ghayesh, Mergen H. (School of Mechanical, Materials and Mechatronic Engineering, University of Wollongong)
  • Received : 2014.09.06
  • Accepted : 2015.08.18
  • Published : 2015.09.25


The current paper aims at investigating the nonlinear dynamical behaviour of an electrically actuated microcantilever. The microcantilever is excited by a combination of AC and DC voltages. The nonlinear equation of motion of the microcantilever is obtained by means of force and moment balances. A high-dimensional Galerkin scheme is then applied to reduce the equation of motion to a discrete model. A numerical technique, based on the pseudo-arclength continuation method, is used to solve the discretized model. The electrostatic deflection of the microcantilever and static pull-in instabilities, due to the DC voltage, are analyzed by plotting the so-called DC voltage-deflection curves. At the simultaneous presence of the DC and AC voltages, the nonlinear dynamical behaviour of the microcantilever is analyzed by plotting frequency-response and force-response curves.


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