In-Situ Heat Cooling using Thick Graphene and Temperature Monitoring with Single Mask Process

  • Kwack, Kyuhyun (Dept. of Electrical and Computer Engineering, Seoul National University) ;
  • Chun, Kukjin (Dept. of Electrical and Computer Engineering, Seoul National University)
  • Received : 2015.05.12
  • Accepted : 2015.05.26
  • Published : 2015.05.31


In this paper, in-situ heat cooling with temperature monitoring is reported to solve thermal issues in electric vehicle (EV) batteries. The device consists of a thick graphene cooler on top of the substrate and a platinum-based resistive temperature sensor with an embedded heater above the graphene. The graphene layer is synthesized by using chemical vapor deposition directly on the Ni layer above the Si substrate. The proposed thick graphene heat cooler does not use transfer technology, which involves many process steps and does not provide a high yield. This method also reduces the mechanical damage of the graphene and uses only one photomask. Using this structure, temperature detection and cooling are conducted simultaneously using one device. The temperature coefficient of resistance (TCR) of a $1{\times}1mm^2$ temperature sensor on 1-$\grave{i}m$-thick graphene is $1.573{\times}10^3ppm/^{\circ}C$. The heat source cools down $7.3^{\circ}C$ from $54.4^{\circ}C$ to $47.1^{\circ}C$.



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