Synthesis of Boron-doped Crystalline Si Nanoparticles Synthesized by Using Inductive Coupled Plasma and Double Tube Reactor

유도결합 플라즈마와 이중관 반응기를 이용하여 제조한 보론-도핑된 결정질 실리콘 나노입자의 합성

  • 정천영 (한국에너지기술연구원 창의소재연구실) ;
  • 구정분 (한국에너지기술연구원 창의소재연구실) ;
  • 장보윤 (한국에너지기술연구원 창의소재연구실) ;
  • 이진석 (한국에너지기술연구원 창의소재연구실) ;
  • 김준수 (한국에너지기술연구원 창의소재연구실) ;
  • 한문희 (충남대학교 에너지과학기술대학원 신에너지소재공학과)
  • Received : 2014.08.04
  • Accepted : 2014.09.22
  • Published : 2014.10.01


B-doped Si nanoparticles were synthesized by using inductive coupled plasma and specially designed double tube reactor, and their microstructures were investigated. 0~10 sccm of $B_2H_6$ gas was injected during the synthesis of Si nanoparticles from $SiH_4$ gas. Highly crystalline Si nanoparticles were synthesized, and their crystallinity did not change with increase of $B_2H_6$ flow rates. From SEM measurement, their particle sizes were approximately 30 nm regardless of $B_2H_6$ flow rates. From SIMS analysis, almost saturation of B in Si nanoparticles was detected only when 1 sccm of $B_2H_6$ was injected. When $B_2H_6$ flow rate exceeded 5 sccm, higher concentration of B than solubility limit was detected even if any secondary phase was not detected in XRD or HR-TEM results. Due to their high electronic conductivity, those heavily B-doped Si nanoparticles can be a potential candidate for an active material in Li-ion battery anode.


Supported by : 한국에너지기술연구원


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